Astm F 1844 – 97 (Reapproved 2002) pdf free download

Standard Practice for
Measuring Sheet Resistance of Thin Film Conductors For
Flat Panel Display Manufacturing Using a Noncontact Eddy
Current Gage1

This standard is issued under the fixed designation F 1844; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.