Standard Guide for
Measuring Widths of Interfaces in Sputter Depth Profiling
This standard is issued under the fixed designation E 1438; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
click below Astm E 1438 – 91 (Reapproved 2001) pdf free download